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inf208 - Microrobotics and Microsystems Technology (Complete module description)
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Module label Microrobotics and Microsystems Technology
Module code inf208
Credit points 6.0 KP
Workload 180 h
Faculty/Institute Department of Computing Science
Used in course of study
  • Bachelor's Programme Computing Science (Bachelor) > Akzentsetzungsbereich - Wahlbereich Informatik
  • Dual-Subject Bachelor's Programme Computing Science (Bachelor) > Wahlpflicht Technische Informatik (30 KP)
  • Master of Education Programme (Gymnasium) Computing Science (Master of Education) > Mastermodule
  • Master's Programme Computing Science (Master) > Nicht Informatik
Contact person
Module responsibility
Authorized examiners
Entry requirements
Skills to be acquired in this module
Within the last few years, microrobotics and microsystem technology (MST) have become a focus of interest to industry and evolved into an important field with great application potential. It plays a decisive role for industry to be competitive in many areas such as medicine, production engineering, biotechnology, environmental technology, automotive products, etc. Despite of the growing interest in this new technology, there is hardly any book or lecture course that treats microrobotics and MST in a coherent and comprehensive way. This course is an attempt of the Microrobotics and Control Engineering Division (AMiR) to give students a systematic introduction to microrobotics and MST. It discusses all important aspects of this rapidly expanding technology, its diversity of products and fields of application. The course contains an overview of numerous ideas of new devices and the problems of manufacturing them.

Professional competence:
The students:
  • name the ideas, challenges and activities of microrobotics and microsystem technology
  • describe the microrobotics and MST applications
  • characterise MST methods
  • name microsensor functionality
  • characterise microsensor examples
  • discuss MST terms of information technology
  • classify microrobotics

Methodological competence
The students:
  • discover interdisciplinary connections and links between scientific and technical fields of research and development
  • learn technical abstraction of complex contexts

Social competence
The students:
  • solving problems partially as group
  • present their solutions and approaches to the group

The students:
  • reflect their knowledge of technical computer science
  • learn to expand on their professional competence independently
Module contents
Ideas and problems of microrobotics and MST; applications; techniques of MST; silicon-based micromechanics; LIGA technology; microactuators: principles and examples (electrostatic, piezoelectric, magnetostrictive, electromagnetic, SMA-based, thermomechanical, electrorheological and other actuators); microsensors: principles and examples (force and pressure, position and speed, acceleration, biological and chemical, temperature and other sensors); MST and information processing; microsystem design and simulation; classification of microrobots; coarse positioning of a microrobot; fine positioning of a microrobot; handling of microparts: problems and solutions; micro grasp techniques; microassembly; process automation by microrobots; desktop robot cell in SEM
Reader's advisory
  • Lecture notes

  • Fatikow, S.: Mikroroboter und Mikromontage, Teubner, Stuttgart Leipzig, 2000
  • Fatikow, S./Rembold, U.: Microsystem Technology and Microrobotics, Springer, Berlin Heidelberg New York, 1997

Secondary Literature (only available for some subareas!):
  • Brück, A. und Schmidt, A.: Angewandte Mikrotechnik, Hanser, München Wien, 2001
  • Ehrfeld, W. (Hrsg.): Handbuch Mikrotechnik, Hanser, München Wien, 2000
  • Elbel, Th.: Mikrosensorik, Vieweg, Wiesbaden, 1996
  • Fukuda, T. and Menz, W. (Eds.): Micro Mechanical Systems, Elsevier, Amsterdam, 1998
  • Gardner, J.W.: Microsensors, Wiley, Chichester, 1994
  • Gerlach, G. und Dötzel, W.: Grundlagen der Mikrosystemtechnik, Hanser, München Wien, 1997
  • Krause, W.: Fertigung in der Feinwerk- und Mikrotechnik, Hanser, 1995
  • Menz, W. und Mohr, J.: Mikrosystemtechnik für Ingenieure, VCH, Weinheim, 1997
  • Mescheder, U.: Mikrosystemtechnik, Teubner, Stuttgart Leipzig, 2000
  • Tränkler, H.-R. und Obermeier, E. (Hrsg.): Sensortechnik, Springer, Berlin Heidelberg, 1998
  • Völklein, F. und Zetterer, Th.: Einführung in die Mikrosystemtechnik, Vieweg, Wiesbaden, 2000
Language of instruction German
Duration (semesters) 1 Semester
Module frequency jährlich
Module capacity unlimited
Reference text
Associated with the modules:
Embedded Systems and Microrobotics
Modullevel AS (Akzentsetzung / Accentuation)
Modulart je nach Studiengang Pflicht oder Wahlpflicht
Lern-/Lehrform / Type of program V+Ü
Vorkenntnisse / Previous knowledge Analysis II oder Numerik
Course type Comment SWS Frequency Workload attendance
Lecture 3.00 WiSe 42 h
Exercises 1.00 WiSe 14 h
Total time of attendance for the module 56 h
Examination Time of examination Type of examination
Final exam of module
At the end of the semester
Oral exam in German