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inf208 - Microrobotics and Microsystems Technology (Complete module description)
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Module label Microrobotics and Microsystems Technology
Module abbreviation inf208
Credit points 6.0 KP
Workload 180 h
Institute directory Department of Computing Science
Applicability of the module
  • Bachelor's Programme Computing Science (Bachelor) > Akzentsetzungsbereich - Wahlbereich Informatik
  • Dual-Subject Bachelor's Programme Computing Science (Bachelor) > Wahlpflicht Technische Informatik (30 KP)
  • Master of Education Programme (Gymnasium) Computing Science (Master of Education) > Wahlpflichtmodule (Technische Informatik)
  • Master's Programme Computing Science (Master) > Interdisziplinäre Module
Responsible persons
  • Fatikow, Sergej (module responsibility)
  • Lehrenden, Die im Modul (Prüfungsberechtigt)
No participant requirements
Skills to be acquired in this module
Within the last few years, microrobotics and microsystem technology (MST) have become a focus of interest to industry and evolved into an important field with great application potential. It plays a decisive role for industry to be competitive in many areas such as medicine, production engineering, biotechnology, environmental technology, automotive products, etc. Despite of the growing interest in this new technology, there is hardly any book or lecture course that treats microrobotics and MST in a coherent and comprehensive way. This course is an attempt of the Microrobotics and Control Engineering Division (AMiR) to give students a systematic introduction to microrobotics and MST. It discusses all important aspects of this rapidly expanding technology, its diversity of products and fields of application. The course contains an overview of numerous ideas of new devices and the problems of manufacturing them.
Professional competence:
The students:
  • name the ideas, challenges and activities of microrobotics and microsystem technology
  • describe the microrobotics and MST applications
  • characterise MST methods
  • name microsensor functionality
  • characterise microsensor examples
  • discuss MST terms of information technology
  • classify microrobotics
Methodological competence
The students:
  • discover interdisciplinary connections and links between scientific and technical fields of research and development
  • learn technical abstraction of complex contexts
Social competence
The students:
  • solving problems partially as group
  • present their solutions and approaches to the group
The students:
  • reflect their knowledge of technical computer science
  • learn to expand on their professional competence independently
Module contents
Ideas and problems of microrobotics and MST:
  • applications;
  • techniques of MST;
  • silicon-based micromechanics;
  • LIGA technology;
  • principles and examples (electrostatic, piezoelectric, magnetostrictive, electromagnetic, SMA-based, thermomechanical, electrorheological and other actuators);
  • principles and examples (force and pressure, position and speed, acceleration, biological and chemical, temperature and other sensors);
  • MST and information processing;
  • microsystem design and simulation;
  • classification of microrobots;
  • coarse positioning of a microrobot;
  • fine positioning of a microrobot;
Handling of microparts:
  • problems and solutions;
  • micro grasp techniques;
  • microassembly;
Process automation by microrobots:
  • desktop robot cell in SEM
Recommended reading
  •  Vorlesungsskript in Buchform
  • Fatikow, S.: Mikroroboter und Mikromontage, Teubner, Stuttgart Leipzig, 2000
  • Fatikow, S./Rembold, U.: Microsystem Technology and Microrobotics, Springer, Berlin Heidelberg New York, 1997
  • Menz, W. und Mohr, J.: Mikrosystemtechnik für Ingenieure, VCH, Weinheim, 1997

Secondary Literature:
  • Brück, A. und Schmidt, A.: Angewandte Mikrotechnik, Hanser, München Wien, 2001
  • Ehrfeld, W. (Hrsg.): Handbuch Mikrotechnik, Hanser, München Wien, 2000
  • Elbel, Th.: Mikrosensorik, Vieweg, Wiesbaden, 1996
  • Fukuda, T. and Menz, W. (Eds.): Micro Mechanical Systems, Elsevier, Amsterdam, 1998
  • Gardner, J.W.: Microsensors, Wiley, Chichester, 1994
  • Gerlach, G. und Dötzel, W.: Grundlagen der Mikrosystemtechnik, Hanser, München Wien, 1997
  • Krause, W.: Fertigung in der Feinwerk- und Mikrotechnik, Hanser, 1995
  • Mescheder, U.: Mikrosystemtechnik, Teubner, Stuttgart Leipzig, 2000 
  • Tränkler, H.-R. und Obermeier, E. (Hrsg.): Sensortechnik, Springer, Berlin Heidelberg, 1998 
  • Völklein, F. und Zetterer, Th.: Einführung in die Mikrosystemtechnik, Vieweg, Wiesbaden, 2000
Language of instruction German
Duration (semesters) 1 Semester
Module frequency annual
Module capacity unlimited
Reference text
Associated with the modules:
  • Embedded Systems and Microrobotics
Module level
Type of module
Teaching/Learning method 1VL + 1Ü
Previous knowledge none
Type of course Comment SWS Frequency Workload of compulsory attendance
Lecture 3 WiSe 42
Exercises 1 WiSe 14
Total module attendance time 56 h
Examination Examination times Type of examination
Final exam of module
At the end of the semester
Oral exam in German