phy631 - Advanced Metrology (Complete module description)

Attendance: 56 hrs, Self study: 124 hrs

The course in Advanced Metrology sets up a high level route enabling the students to acquire skills to allow them to operate effectively in the majors of Engineering Physics. This is achieved by provision of state-of-the-art technical and physical approaches covering broad aspects of advanced metrology within the context of Laser&optics, Biomedical physics & acoustics, and renewable energies.
Demonstrate systematic knowledge across appropriate advanced metrology technologies, management and environmental issues to provide solutions for international industries and/or research organisations

The module combines theory and practical applications of the fundaments of metrology in all majors.
• Fundamentals of Metrology
• Dimensional Measurement Systems
• Basic metrology operators including Association and Filtration.
• Optical Metrology and Instrumentation
• Surface and Nanometrology
• Machine Tool and Large Volume Metrology
• Process Measurement and Control
• Individual Project

T. Yoshizawa (Ed.): Handbook of Optical Metrology: Principles and Applications, 2nd rev. ed., Crc Pr Inc., 2015
Recent publications on specific topics

1 written exam or 1 presentation or 1 oral exam or 1 seminar paper