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20.09.2021 04:40:22
Lecture: 5.04.643 Micro Technology - Details
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General information

Course name Lecture: 5.04.643 Micro Technology
Course number 5.04.643
Semester Sommersemester 2019
Current number of participants 9
Home institute Institute of Physics
Courses type Lecture in category Teaching
First date Mon., 01.04.2019 10:00 - 14:00, Room: W03 2-240
Learning organisation Literature:
F.Völklein, Th.Zetterer: Einführung in die Mikrosystemtechnik (Vieweg)
Menz/Mohr/Paul: Micro System Technology (Wiley-VCH; also in German)
Mack: Fundamental principles of Optical Lithography (Wiley)
Suzuki/Smith; Microlithography (CRC)
Bäuerle: Laser Processing and Chemistry (Springer)
Sinzinger/Jahns: Microoptics (Wiley)
Further literature according indication during course
Performance record 1hr written examination
Lehrsprache englisch
ECTS points 3

Course location / Course dates

W03 2-240 Mon.. 10:00 - 14:00 (6x)


Aim/learning outcomes:
Today micro-electro-mechanical systems (MEMS) and micro opto-electro-mechanical systems (MOEMS) and components are important in daily life and industry. The students get introduced to the modern field of micro technology. In addition this is also of relevance for those who are interested in sensors, in manufacturing of micro electronic components or in special applications of optics and lasers, e.g. laser processing for the micro and nano world. The students get also prepared to make use of tha tknowledge industry. Some practical work is demontrated in the laboratory.

Basic technology & methods, processes, materials, thin layers, deposition (e.g., evaporation, sputtering, CVD, diffusion, doping etc.), etching; particular emphasis is put on optical methods such as lithography, deep lithography, LIGA, laser micro machining, femtosecond laser applications.

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