F.Völklein, Th.Zetterer: Einführung in die Mikrosystemtechnik (Vieweg)
Menz/Mohr/Paul: Micro System Technology (Wiley-VCH; also in German)
Mack: Fundamental principles of Optical Lithography (Wiley)
Suzuki/Smith; Microlithography (CRC)
Bäuerle: Laser Processing and Chemistry (Springer)
Sinzinger/Jahns: Microoptics (Wiley)
Further literature according indication during course
Aim/learning outcomes: Today micro-electro-mechanical systems (MEMS) and micro opto-electro-mechanical systems (MOEMS) and components are important in daily life and industry. The students get introduced to the modern field of micro technology. In addition this is also of relevance for those who are interested in sensors, in manufacturing of micro electronic components or in special applications of optics and lasers, e.g. laser processing for the micro and nano world. The students get also prepared to make use of tha tknowledge industry. Some practical work is demontrated in the laboratory.
Content: Basic technology & methods, processes, materials, thin layers, deposition (e.g., evaporation, sputtering, CVD, diffusion, doping etc.), etching; particular emphasis is put on optical methods such as lithography, deep lithography, LIGA, laser micro machining, femtosecond laser applications.
The course is part of admission "Anmeldung gesperrt (global)".
Erzeugt durch den Stud.IP-Support Settings for unsubscribe: